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| LEADER |
00644nmm a2200193 u 4500 |
| 001 |
EB002201858 |
| 003 |
EBX01000000000000001339061 |
| 005 |
00000000000000.0 |
| 007 |
cr||||||||||||||||||||| |
| 008 |
240404 ||| |
| 020 |
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|a 9781510668607
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| 020 |
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|a 9781510668614
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| 245 |
0 |
0 |
|a 38th European Mask and Lithography Conference (EMLC 2023)
|h Elektronische Ressource
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| 260 |
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|a Bellingham, Wash.
|b SPIE
|c 2023
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| 989 |
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|b SPIE
|a SPIE Conference Proceedings
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| 490 |
0 |
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|a Proceedings of SPIE
|
| 856 |
4 |
0 |
|u https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12802
|x Verlag
|3 Volltext
|
| 082 |
0 |
|
|a 600
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| 082 |
0 |
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|a 500
|