(2023). 38th European Mask and Lithography Conference (EMLC 2023). Bellingham, Wash: SPIE.
Chicago Style Citation38th European Mask and Lithography Conference (EMLC 2023). Bellingham, Wash: SPIE, 2023.
MLA Citation38th European Mask and Lithography Conference (EMLC 2023). Bellingham, Wash: SPIE, 2023.
Warning: These citations may not always be 100% accurate.