APA Citation

(2023). 38th European Mask and Lithography Conference (EMLC 2023). Bellingham, Wash: SPIE.

Chicago Style Citation

38th European Mask and Lithography Conference (EMLC 2023). Bellingham, Wash: SPIE, 2023.

MLA Citation

38th European Mask and Lithography Conference (EMLC 2023). Bellingham, Wash: SPIE, 2023.

Warning: These citations may not always be 100% accurate.