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product_txtF_mv:"Wiley Online Books"
author_facet:"Fedder, G. K."
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Enabling technologies for MEMS and nanodevices : advanced micro and nanosystems
by
Baltes, H.
Published 2004
Wiley-Blackwell
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CMOS-MEMS
by
Brand, O.
Published 2005
Wiley-VCH
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620 - Engineering & allied operations
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621 - Applied physics
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Wiley Online Books
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Brand, O.
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Fedder, G. K.
Baltes, H.
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Hierold, C.
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