Enabling technologies for MEMS and nanodevices advanced micro and nanosystems
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon proce...
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
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Wiley-Blackwell
2004
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| Series: | Advanced micro and nanosystems
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| Subjects: | |
| Online Access: | |
| Collection: | Wiley Online Books - Collection details see MPG.ReNa |
| Summary: | This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. |
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| Physical Description: | 440 S. |
| ISBN: | 9783527307463 |