Compact plasma and focused ion beams
This book discusses a method to produce a compact microwave plasma by overcoming challenges posed both by (i) geometrical cutoff of the waveguide and (ii) density cutoff of the plasma. It then presents the properties of such compact plasmas. Finally, it brings out a new area of applications where su...
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| Format: | eBook |
| Language: | English |
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Boca Raton
Taylor & Francis
2014
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| Collection: | O'Reilly - Collection details see MPG.ReNa |
| Summary: | This book discusses a method to produce a compact microwave plasma by overcoming challenges posed both by (i) geometrical cutoff of the waveguide and (ii) density cutoff of the plasma. It then presents the properties of such compact plasmas. Finally, it brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams |
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| Physical Description: | 1 online resource text file, PDF |
| ISBN: | 9781466557888 9781466557925 1306180147 1466557923 1466557885 |