Wafer manufacturing shaping of single crystal silicon wafers
"A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicin...
| Main Authors: | , |
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| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, NJ
John Wiley & Sons Ltd
2021
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| Edition: | First edition |
| Subjects: | |
| Online Access: | |
| Collection: | O'Reilly - Collection details see MPG.ReNa |
| Summary: | "A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicing is the first post crystal-growth step toward producing a polished wafer for electronic device fabrication in the semiconductor and photovoltaic (PV) industry. Advanced slicing technologies such as wiresawing are nowadays widely used in wafer production because of its ability to cut single crystalline and polycrystalline crystals with large diameter and produce wafers from thick (a few mm) to very thin sizes (300 microns)."-- |
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| Physical Description: | xiv, 290 pages illustrations (some color) |
| ISBN: | 1118696239 1118696255 9781118696231 1118696220 9781118696224 9781118696255 |