System-level Modeling of MEMS

Bibliographic Details
Main Author: Bechtold, Tamara ([Hrsg.])
Other Authors: Schrag, Gabriele ([Hrsg.]), Feng, Lihong ([Hrsg.])
Format: eBook
Language:English
Published: Weinheim Wiley-VCH 2013
Subjects:
Online Access:
Collection: Wiley Online Books - Collection details see MPG.ReNa
Description
Physical Description:XXXII, 530 S.
ISBN:9783527319039