APA Citation

(2013). 29th European Mask and Lithography Conference. Bellingham, Wash: SPIE.

Chicago Style Citation

29th European Mask and Lithography Conference. Bellingham, Wash: SPIE, 2013.

MLA Citation

29th European Mask and Lithography Conference. Bellingham, Wash: SPIE, 2013.

Warning: These citations may not always be 100% accurate.