(2013). 29th European Mask and Lithography Conference. Bellingham, Wash: SPIE.
Chicago Style Citation29th European Mask and Lithography Conference. Bellingham, Wash: SPIE, 2013.
MLA Citation29th European Mask and Lithography Conference. Bellingham, Wash: SPIE, 2013.
Warning: These citations may not always be 100% accurate.