APA Citation

(2009). 25th European Mask and Lithography Conference. Berlin; Offenbach: VDE.

Chicago Style Citation

25th European Mask and Lithography Conference. Berlin; Offenbach: VDE, 2009.

MLA Citation

25th European Mask and Lithography Conference. Berlin; Offenbach: VDE, 2009.

Warning: These citations may not always be 100% accurate.